Projection objective having adjacently mounted aspheric lens surfaces

ABSTRACT

A projection objective has at least five lens groups (G 1  to G 5 ) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere ( 21 ) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.

RELATED APPLICATIONS

[0001] This is a continuation application of International patent application PCT/EP 00/13148, filed Dec. 22, 2000, and claiming priority of U.S. provisional application 60/173,523, filed Dec. 29, 1999, and German applications 100 02 626.5 and 100 21 735.7, filed Jan. 22, 2000 and May 4, 2000, respectively.

BACKGROUND OF THE INVENTION

[0002] International patent publication WO 99/52004 discloses catadioptric optic projection objectives which include a plurality of aspheric lens surfaces. For example, the projection objective shown in FIG. 4 includes 12 aspheric lens surfaces for 15 lenses. The manufacturing costs of aspheric lens surfaces with the accuracy required in microlithography are very high. Accordingly, these objectives are of little interest in the marketplace because of the many required aspheric lens surfaces.

[0003] European patent publication 0 322 201 discloses an optical projection system especially for photolithography. The projection objective known from this publication includes five lens groups. The first, second, third and fifth lens groups each have only one lens. In part, the lenses are provided with aspheric lens surfaces. An aspheric object end mounted lens surface of the fifth lens group follows an aspheric lens surface mounted in the fourth lens group at the image end.

[0004] European patent publication 0 851 304 discloses the adjacent mounting of aspheric lens surfaces in a projection objective. These aspheric lenses are supported so as to be displaceable in the radial direction. The projection objective is matched via the relative movement of the lenses. The aspheric lens surfaces are especially rotationally unsymmetrical because of the possibility of displacing the aspheres in radial direction with respect to each other. Because of the movable support of the aspheric lenses, this arrangement is not suitable for every projection objective because projection objectives designed especially for short wavelengths react sensitively to the smallest position change of the individual lenses. Accordingly, the position stability, which is achievable because of the special support of the lenses, is not sufficient in order to reliably ensure a good imaging quality.

[0005] German patent publication 198 18 444 discloses a projection optic arrangement having a purely refractive projection objective which includes six lens groups G1 to G6. In this projection objective, the lens groups G1, G3 and G5 have positive refractive power. The lens groups G2 and G4 have negative refractive power. To correct imaging errors, some lenses, especially in the fourth and fifth lens groups, have aspheric lens surfaces.

[0006] German patent publication 199 42 281.8 discloses additional projection exposure objectives which have six lens groups. The second lens group and the fourth lens group have negative refractive power. In the projection objectives known from this publication, lenses having aspheric lens surfaces are preferably arranged in the first three lens groups. A minimum number of spherical lens surfaces are arranged between the aspheric lens surfaces. This minimum spacing between the aspheric lens surfaces appears necessary so that the utilized aspheric lenses can develop their optimal effect.

[0007] From U.S. Pat. No. 4,871,237 it is already known to match an objective in dependence upon barometric pressure via the refractive index of a fill gas in the lens intermediate spaces. For example, spherical aberration, coma and other imaging errors can be corrected with a suitable combination of intermediate spaces.

[0008] U.S. Pat. No. 5,559,584 discloses introducing a protective gas into the intermediate spaces between a wafer and/or a reticle and the projection objective in a projection exposure system for manufacturing microstructured components.

SUMMARY OF THE INVENTION

[0009] It is an object of the invention to provide a projection objective and a projection exposure system as well as a method for manufacturing microstructured components. These components are improved with respect to the imaging quality and the resolution capacity. Furthermore, it is an object of the invention to reduce manufacturing costs.

[0010] The projection objective of the invention defines a maximum lens diameter (D2) and includes: a plurality of lenses defining an object plane (0) and an image plane (0′); at least two of the lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; the double asphere being mounted at a distance from the image plane (0′) corresponding at least to the maximum lens diameter (D2); the lenses of the double asphere defining a mean lens diameter; and, the mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of the mean lens diameter.

[0011] In a projection objective having a plurality of lenses, the measure of arranging the double asphere at a spacing of at least the maximum lens diameter of the objective away from the image plane (especially the wafer plane), improves the imaging qualities of a projection objective in comparison to a projection objective without such double aspheres. In the above, at least two mutually adjacent mounted lens surfaces are aspheric and this is identified as a double asphere. The spacing between the aspheric lens surfaces of the double asphere is maximally half the lens diameter of the mean diameter of the double asphere. The numerical aperture can especially be increased in a refractive projection objective with the use of at least one double asphere in that the first convex form is shortened so that, at a constant length of the projection objective, the third convex form experiences an increase of the numerical aperture of approximately 0.03 to 0.05.

[0012] Especially in purely refractive projection objectives, the use of double aspheres with an arrangement in the first three lens groups has been shown to be especially advantageous.

[0013] In lithographic objectives, there are particular locations, which operate especially well on difficult to control aberrations, when these locations are aspherized. Precisely here it is purposeful to utilize especially the effectiveness at the corresponding location via a complex aspheric function. The region of the first restriction and the end of the second convex form as well as regions behind the diaphragm are predestined. Since the technical realization of complex aspheres is subjected to technical limits, the complex asphere functions are realized by means of double aspheres. In this way, a still more extensive correction is possible and the aspheres of the double asphere are technically realizable.

[0014] Furthermore, it has been shown to be advantageous to provide aspheric lens surfaces as aspheric lens surfaces of the double asphere. The radius of the aspheric lens surfaces of the best-fitting spherical lens surface (identified as the profile radius) differ very little. Preferably, the reciprocal values of the profile radius or radii of the double aspheres deviate less than 30% from each other. As a reference value, the reciprocal value of the larger radius in magnitude is applied.

[0015] It has been shown to be especially advantageous that the apex radii of the aspherical lens surfaces of the double aspheres differ by less than 30% with reference to the larger apex radius in magnitude.

[0016] In the area of microlithography, the developmental work is directed to increasing the resolution. On the one hand, the resolution can be increased by increasing the numerical aperture, utilizing ever smaller wavelengths and even by correcting the occurring imaging errors. For an increase of the image end numerical aperture, the last convex form of the objective arranged at the image end is increased. However, it is problematic that only a fixed pregiven space can be made available for the objective. Accordingly, in order to provide a larger numerical aperture, it is therefore necessary to save space in other regions of the objective.

[0017] It has been shown to be advantageous to provide the space needed for increasing the numerical aperture by shortening the first convex form. With the first convex form, especially the input telecentrics and the distortion are corrected. By utilizing double aspheres, it is possible to correct the input telecentrics as well as the distortion with ease and at a short distance. With the double asphere, a variable adjustment of the location is made available at a short distance. With the possibility of varying the location, the distortion can be corrected. Especially the input telecentrics is corrected because the angle can be flexibly influenced.

[0018] Corrective means has already been made available in the input region of the objective especially with the use of a double asphere in a refractive projection objective in the region of the first two lens groups, that is, up to and including the first lens group of negative refractive power. Accordingly, the corrective means, which is required in the third convex form, are reduced for ensuring a uniform or constant imaging quality.

[0019] Furthermore, by providing a double asphere in the forward region of the objective, especially up to the second restriction, the number of lenses is reduced. This operates advantageously on the manufacturing costs.

[0020] In purely refractive projection objectives, it has been shown to be advantageous to provide aspheric lens surfaces in the forward region of the objective ahead of the second restriction to improve the imaging quality. For example, for a numerical aperture of 0.83, the deviation from the wavefront of a spherical wave is reduced to less than 6 mλ with a field of 8×26 mm² referred to 248 nm.

[0021] The imaging characteristics of the objective can be changed because of fluctuations of the atmospheric pressure. In order to compensate for such pressure fluctuations, it has been shown to be advantageous to charge an intermediate space between two lens surfaces with pressure in a targeted manner so that pressure changes, especially of the atmospheric pressure, can be compensated. Furthermore, the targeted application of pressure can be used for a further reduction of imaging errors.

[0022] Furthermore, it has been shown to be advantageous to provide at least one of the end plates with a pressure manipulator so that a curvature of the plate or lens can be generated with a two-sided application of pressure of the particular lens or the particular plate. For a three-point support of the end plate and an application of pressure of the gas space, the three-waviness during operation is corrected in a targeted manner by means of the through-bending of the end plate. With an n-point support, an n-waviness can be corrected.

[0023] A force, which is directed in the z-direction, for curving the lens can be introduced via coaxially mounted actuators, especially, piezos. The force, which is introduced by the actuators, is directed to the lens center point.

BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The invention will now be described with reference to the drawings wherein:

[0025]FIG. 1 shows a projection exposure system;

[0026]FIG. 2 shows a projection objective for the wavelength 157 nm having a numerical aperture of 0.8;

[0027]FIG. 3 is a projection objective for the wavelength 248 nm having a numerical aperture of 0.83;

[0028]FIG. 4 is a projection objective for the wavelength 248 nm having a numerical aperture of 0.9;

[0029]FIG. 5 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.85;

[0030]FIG. 6 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.9;

[0031]FIG. 7 is a projection objective for the wavelength 157 nm having a numerical aperture of 0.9;

[0032]FIG. 8 is a projection objective for the wavelength 193 nm having a numerical aperture of 0.9;

[0033]FIG. 9 is a catadioptric projection objective having a double asphere for the wavelength of 157 nm and having a numerical aperture of 0.8.

DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE INVENTION

[0034] Referring to FIG. 1, the principle configuration of a projection exposure system is described. The projection exposure system 1 includes an illuminating unit 3 and a projection objective 5. The projection objective 5 includes a lens arrangement 19 having an aperture diaphragm AP. An optical axis 7 is defined by the lens arrangement 19. Different lens arrangements are explained in greater detail hereinafter with respect to FIGS. 2 to 6. A mask 9 is mounted between the illuminating unit 3 and the projection objective 5. The mask 9 is held in the beam path by means of a mask holder 11. Such masks 9, which are used in microlithography, have a micrometer-nanometer structure which is imaged demagnified on an image plane 13 by means of the projection objective 5 up to a factor of 10, especially by the factor 4. In the image plane 13, a substrate 15 or a wafer is held. The substrate 15 or wafer is positioned by a substrate holder 17.

[0035] The minimal structures, which can still be resolved, are dependent upon the wavelength λ of the light, which is used for the illumination, as well as in dependence upon the image side numerical aperture of the projection objective 5. The maximum attainable resolution of the projection exposure system 1 increases with falling wavelength λ of the exposure illuminating unit 3 and with an increasing image end numerical aperture of the projection objective 5.

[0036] The projection objective 19 shown in FIG. 2 includes six lens groups G1 to G6. This projection objective is designed for the wavelength 157 nm. The first lens group G1 or first convex form is defined by the lenses L101 to L103 which are all biconvex lenses. This first lens group has positive refractive power. The last lens surface of this lens group G1, which is mounted at the image end, is aspherized. This lens surface is identified by AS1. The last lens of this lens group G1 is a biconvex lens which can be clearly assigned to the first lens group.

[0037] The lens group G2 or first constriction, which follows the lens group G1, includes the three lenses L104 to L106. This lens group G2 has negative refractive power and defines a restriction. An object end mounted lens surface AS2 of the lens L104 is aspheric. Furthermore, the image end mounted lens surface of lens L106 is aspheric. A double asphere is formed by the two lens surfaces AS1 and AS2.

[0038] The lens group G3 has positive refractive power and is defined by the lenses L107 to L111. The last lens surface of this lens group is the lens L111 which is arranged at the image end and is aspherized. This lens group is a convex form.

[0039] The second lens group G4 of negative refractive power continues from the third lens group. This lens group G4 is defined by the lenses L112 to L115. This lens group defines a constriction.

[0040] The fifth lens group G5 has the lenses L116 to L125 and has positive refractive power and includes an aperture diaphragm AP which is mounted between the lens L119 and the lens L120.

[0041] The sixth lens group G6 is defined by the lenses or plates L126 and L127. This objective is designed for the wavelength 157 nm having a spectral bandwidth of the illuminating source of 1.5 pm and the lenses L113 to L115 and L119 for this objective are of sodium fluoride. With the use of a second material (here sodium fluoride), especially chromatic errors can be corrected. The chromatic transverse errors are significantly reduced because of the use of NaF in the first restriction. Even the chromatic longitudinal error is somewhat reduced. The largest individual contribution to correction of the chromatic longitudinal errors is achieved with the use of NaF in the lens group G5.

[0042] The positive lenses L116 to L118 of the lens group G5 continue from the lens group G4 and are of lithium fluoride. With the use of lithium fluoride at this location in the objective, especially the monochromatic correction is facilitated because only small individual refractive powers are needed for achromatization because of the larger dispersion distance of lithium fluoride and sodium fluoride than of calcium fluoride and sodium fluoride. The basic configuration does not differ so significantly from a chromatic objective because of the special material selection.

[0043] The two positive lenses, which are arranged after the diaphragm, are likewise of lithium fluoride and also make, as explained with respect to the lithium lenses mounted ahead of the diaphragm, an important contribution to the correction of the chromatic longitudinal error.

[0044] The lens L122, whose two surfaces run almost at a constant spacing to each other, comprises calcium fluoride. The lens is very significant for the monochromatic correction and has only a slight influence on the chromatic longitudinal error.

[0045] The last three lenses of the fifth lens group G5, L123 to L125, are of lithium fluoride. These lenses supply a smaller but nonetheless very valuable contribution to the correction of the chromatic longitudinal error.

[0046] The sixth lens group includes the lenses or planar plates L126 and L127 which comprise calcium fluoride.

[0047] This objective is designed for illuminating a field of 8×26 mm. The structural length from position 0 to position 0′ is 1,000 mm. The numerical aperture is 0.8. The precise lens data are set forth in Table 1.

[0048] The aspheric surfaces are in all embodiments described by the equation: ${P(h)} = {{\frac{\delta \cdot h \cdot h}{1 + \sqrt{1 - {\left( {1 + K} \right) \cdot \delta \cdot \delta \cdot h \cdot h}}} + {C_{1}h^{4}} + \ldots + {C_{n}h^{{2n} + 2}\quad \delta}} = {1/R}}$

[0049] wherein: P is the arrow height as a function of the radius h (elevation to the optical axis 7 ) with the aspheric constants C₁ to C_(n) given in the Tables. R is the apex radius.

[0050] The projection objective shown in FIG. 3 includes six lens groups G1 to G6 having the lenses L201 to L225 and a divided end plate (L226, L227). This objective is designed for the illumination wavelength 248 nm. The space required for this projection objective 19 amounts precisely to 1,000 mm from object plane 0 to image plane 0′. At the image end, this objective 19 has a numerical aperture of 0.83. The field which can be exposed by this projection objective is 8×26 mm.

[0051] The first lens group G1 includes the lenses L201 to L204 of which the lenses L201 to 203 are biconvex lenses.

[0052] The first lens L204 of the lens group G1 has an aspheric form on the image end lens surface. This asphere is identified by AS1.

[0053] The second lens group G2 includes the three lenses L205 to L207. These lenses have a biconcave form and the lens surfaces of the lenses L205 and L207, which face toward the respective bounding lens groups, are aspheric. The aspheric lens surface of the lens L205 is identified by AS2. In this way, a double asphere is formed by the two mutually adjacent aspheric lens surfaces AS1 and AS2. The last lens of the lens group G2 is provided as aspheric on the side facing the wafer.

[0054] The third lens group includes the lenses L208 to L21. With this lens group G3, a convex form is provided. The lens L211 is made aspheric on the image end lens surface.

[0055] The fourth lens group G4 is formed by the lenses L213 to L215 which are all configured to be biconcave. This lens group G4 is the second lens group of negative refractive power. With this lens group, a restriction is formed.

[0056] The lens group G5 includes the lenses L216 to L225. An aperture diaphragm is mounted between the lenses L218 and L219. The diaphragm curvature between the peripheral ray at the diaphragm at a numerical aperture of 0.83 and the intersect point of the chief ray with the optical axis is 30.9 mm. With this lens group, a convex form is provided.

[0057] The sixth lens group G6 includes the lenses L226 and L227 and these lenses are configured as planar plates.

[0058] The precise lens data of this projection objective 19 are set forth in Table 2. For the same structural length of the objective from 0 to 0′ of 1,000 mm compared to FIG. 2, the aperture is increased further to 0.83 with an excellent correction.

[0059] The projection objective shown in FIG. 4 includes six lens groups having the lenses L301 to L327. The objective is designed for the illuminating wavelength 248 nm and has a numerical aperture of 0.9.

[0060] The first lens group G1 includes the lenses L301 to L304. This lens group has a positive refractive power. The refractive power especially of lenses L302 to L303 is very low. The focal length of this lens at L302 is 1077.874 mm and is −92397.86 mm at L303.

[0061] A lens group of negative refractive power G2 continues from this last lens group and is formed by the three lenses L305 to L307. The first lens surface of this lens group G2 is arranged at the image end and is made aspheric and is identified by AS1. The lens surface of lens L305 facing toward the lens surface AS1 is made aspheric so that a double asphere is formed by the lens surfaces AS1 and AS2. Between these aspheric lens surfaces AS1 and AS2, there is a clearly recognizable spacing provided in contrast to the previous embodiment. In this double asphere, the equidistant arrangement of the surfaces AS1 and AS2 is no longer completely utilized and the double asphere opens somewhat toward the outside.

[0062] The next lens group G3 has a positive refractive power and includes the lenses L308 to L311. This lens group G3 includes an aspheric lens surface and this aspheric lens surface is mounted on the image side on the lens L311.

[0063] The second lens group of negative refractive power G4 includes the lenses L312 to L315. The lens surface of the lens L314 mounted at the image end is made aspheric.

[0064] The next lens group G5 has a positive refractive power and includes the lenses L316 to L325. The diaphragm AP is mounted between the lenses L319 and L320. The two mutually adjacent lens surfaces of lenses L321 and L322 are aspheric and are identified as AS3 and AS4. A double asphere is formed by these aspheres AS3 and AS4. An air space is enclosed by the surfaces AS3 and AS4. With this double asphere, especially the spherical aberration and the sine condition at high aperture are better decoupled and easily corrected.

[0065] The sixth lens group includes the lenses L326 and L327 which are configured as thick planar plates. The intermediate space defined by these planar plates is chargeable with an overpressure and an underpressure and/or with a gas for compensating fluctuations of the atmospheric pressure. For more extended correction possibilities, it can be provided that at least one of the planar plates with or without refractive power (that is, also as a lens which is clearly thinner) compensates n-waviness under pressure variation and point mounting. For a targeted deformation of the lens, piezo actuators can be provided on the outer periphery.

[0066] The structural length of this objective from object plane 0 to image plane 0′ is 1139.8 mm. The numerical aperture at the image end amounts to 0.9 with an exposable field of 27.2 mm in the diagonal. The precise lens data are set forth in Table 3.

[0067] The projection objective 19 shown in FIG. 5 includes six lens groups G1 to G6. This projection objective is designed for a wavelength of 193 nm. The first lens group G1 includes the lenses L401 to L404. Already the first object end mounted lens surface of the lens L401 is made aspheric. This asphere acts especially positively on dish-shaped traces and distortion with excellent entry telecentrics because this asphere is mounted at the location at which the best beam separation exists for the high-aperture lithographic objective.

[0068] The lens surface of lens L404, which is provided at the object end, is aspheric and is identified by AS1. A double asphere is formed by this lens surface AS1 and the lens surface of the lens L405 which is mounted at the image end and is likewise aspheric and is identified by AS2. This double asphere operates especially positively on dish-shaped traces while simultaneously providing good correction of the image errors caused by the high aperture. With increasing radial distance from the optical axis, the surfaces AS1 and AS2 of the double asphere have an increasing distance in the direction to the optical axis. This double asphere opens toward the outside and defines a complex corrective means with average beam separation.

[0069] The lens L404 belongs already to the second lens group which includes the lenses L405 to L407. This second lens group has a negative refractive power.

[0070] The first lenses L402 to L405 have an especially low refractive power f_(L402)=1397.664 mm, f_(L403)=509.911 mm, f_(L404)=1371.145 mm and f_(L405)=−342.044 mm. A further aspheric lens surface is provided at the image end on the lens L407.

[0071] The next lens group G3 has a positive refractive power and includes the lenses L408 to L413. The lens L409 has, at the object end, an aspheric lens surface and the lens L413 is provided with an aspheric lens surface at the image side. The aspheric lens L413 has a positive influence on the coma of higher order and on the 45° structures. The air space, which is provided between the lenses L411 and L412 is virtually equidistant.

[0072] The lens group G4 has a negative refractive power and is defined by the lenses L414 to L416. The lens L415 has an aspheric lens surface on the image side. This aspheric lens surface operates in a good mixture on aperture dependent and field dependent imaging errors, especially for objectives having a high aperture.

[0073] The next lens group G5 is defined by the lenses L417 to L427. A diaphragm AP is mounted between the lenses L420 to L421. The lens surface of the lens L422, which follows the diaphragm AP, has an aspheric form. With this aspheric lens, it is possible to carry out the correction of the spheric aberration without influencing other imaging errors. For this purpose, it is, however, necessary with the presence of a clear diaphragm curvature, that the aspheric surface projects into the region of a slide diaphragm.

[0074] Furthermore, the mutually adjacent lens surfaces of the lenses L423 and L424 (identified by AS3 and AS4) are made to have an aspheric form. With this follow-on double asphere, it is especially possible to have an excellent aplanar correction for highest numerical aperture. The simultaneous correction of the spheric aberration and the satisfaction of the sine condition is therefore possible.

[0075] The lens group G6 is configured by the lenses L428 to L429 which are configured as planar plates. It can, in turn, be provided that the intermediate space between the planar parallel plates 428 and 429 are chargeable with a fluid.

[0076] Quartz glass is provided as a lens material. To reduce the chromatic aberration, the lenses L408 and L409 as well as L413 can be made of calcium fluoride. To reduce the compaction effect because of the high radiation load, it can be provided that calcium fluoride be used as a material for the smaller one or for both planar parallel plates L428 and L429. It is noted that, in this projection objective, the maximum diameter of the lens group G3 has, with 398 mm, a greater maximum diameter than the lens group G5. This objective is very well corrected and the deviation from the wavefront of an ideal spherical wave is >=1.2 mλ referred to 193 nm. The spacing between object plane 0 and image plane 0′ is 1188.1 mm and the exposable field is 8×26 mm. The precise lens data are set forth in Table 4.

[0077] The projection objective shown in FIG. 6 includes the lens groups G1 to G6 with the lenses L501 to L530. Planar plates are provided for L529 and L530. This projection objective is designed for the wavelength 193 nm and has a numerical aperture of 0.9. The spacing between the object plane 0 and the image plane 0′ is 1174.6 mm. The exposable field has a size of 8×26 mm. Viewed macroscopically, this projection objective does not differ from the projection objective shown in FIG. 5. Again, especially the lenses L502 and L503 have a low refractive power. The lens L510 is provided especially for the quadratic correction.

[0078] Apart from the planar parallel plates L529 and L530, all lenses L501 to L528 are of quartz glass. This projection objective too is very well corrected and the deviation from the ideal wavefront of a spherical wave is <3.0 mλ referred to 193 nm. The lenses L510, L515, L522 have a low refractive power. The precise lens data are set forth in Table 5. The effect of the aspheric surfaces corresponds principally to the effects described with respect to FIG. 5. The effects are still greater because of the high numerical aperture of 0.9.

[0079] The projection objective shown in FIG. 7 for the wavelength 157 nm includes six lens groups having lenses L601 to L630 with planar parallel plates L629 and L630. The structural length of this projection objective from object plane 0 to image plane 0′ is 997.8 mm. A field of 7×22 mm can be exposed. The numerical aperture of this objective is 0.9. Calcium fluoride is provided as a lens material. A further correction of chromatic errors is achievable with the use of barium fluoride as a lens material for the lenses L614 to L617. The deviation from the wavefront of an ideal spherical wave is <1.8 mλ referred to 157 nm. Viewed macroscopically, the configuration of the projection objective shown in FIG. 7 differs only slightly from the projection objective described with respect to FIGS. 5 and 6. For this reason, reference is made to the description with respect to FIG. 5. The exact lens data are set forth in Table 6.

[0080] The projection objective shown in FIG. 8 includes six lens groups G1 to G6. The first lens group includes the lenses L701 to L704. The lens L701 at the object side and the lens L704 at the image side have aspheric lens surfaces. This first lens group includes only lenses of positive refractive power which have approximately identical diameters.

[0081] The second lens group G2 follows and has a negative refractive power and includes the lenses L705 to L708. The lens L705 has an aspheric lens surface on the side facing toward lens L704 and this aspheric lens surface is identified by AS2. A double asphere 21 is formed by the two aspheric lens surfaces AS1 and AS2. This double asphere is curved toward the wafer and opens slightly in the radial direction. Furthermore, the lens L708 has an aspheric lens surface at the image end.

[0082] The third lens group G3 has lenses L709 to L714 and has a positive refractive power. This lens group includes two aspheric lenses L710 and L714. The air gap, which is formed between the lenses L712 and L713, has an almost constant thickness.

[0083] The fourth lens group G4 includes only two negative lenses L715 and L716 with which a restriction is formed. The lens L715 is provided at the image side with an aspherical lens surface.

[0084] The fifth lens group has lenses L717 to L727 and has a positive refractive power. The diaphragm AP is mounted between the lenses L720 and L721. In this lens group, a further double asphere 21 is provided which is formed by the two aspheric lens surfaces AS3 and AS4 of the lenses L723 and L724. Further aspheric lens surfaces are on the lens L721 on the object side and on lens L727 on the image side.

[0085] The last lens group G6 follows this lens group and is defined by the two planar parallel plates L728 and L729. An intermediate space 25 is formed by the mutually adjacent surfaces of the planar plates L728 and L729. The intermediate space 25 can be charged with pressure.

[0086] This projection objective is designed for the wavelength 193 nm and has a numerical aperture of 0.9. The distance between object plane 0 and image plane 0′ is 1209.6 mm. A field of 10.5×26 mm can be exposed with this projection objective. The maximum deviation from the ideal wavefront of a spherical wave is 3.0 mλ referred to 193 nm. This deviation is determined by means of the program code CODE V. The precise lens data are set forth in Table 7.

[0087] In FIG. 9, a catadioptric projection objective is shown which is designed for the wavelength 157 nm. A field of 22×7 mm can be exposed with this projection objective. The numerical aperture is 0.8. All lenses in this projection objective are made of calcium fluoride. The first lens L801 is provided with an aspheric lens surface on the image side. This aspheric lens supplies especially a valuable contribution to the correction of the distortion.

[0088] The radiation is deflected by mirror SP 1 and impinges on the lens L802 of negative refractive power. The next lens L803 is provided with an aspheric lens surface on the lens side on the image side in the beam path. This aspheric lens supplies an especially valuable contribution to the correction of the spherical aberration.

[0089] The radiation, which propagates from lens L803, is reflected back at the mirror SP 2 and passes the lenses L803 and L802 in the opposite sequence before it is directed via reflection at mirror SP 3 to the lens L804 which is mounted on an optical axis common with the lens L801. An intermediate image Z1 arises between the mirror SP 3 and lens L804. The next lenses L805 and L806 have aspheric lens surfaces AS1 and AS2 on the mutually adjacent surfaces. A double asphere is formed by these aspheres. Furthermore, the objective includes the lenses L807 to L818. The lenses L812, L814, L816 and L818 are provided with aspheric surfaces on the image side and the lens L817 has an aspheric lens surface on the object side. A double asphere is formed by the aspheric lens surfaces of the lenses L816 and L817.

[0090] The subject matter of PCT/EP 00/13148, filed Dec. 22, 2000, is incorporated herein by reference.

[0091] It is understood that the foregoing description is that of the preferred embodiments of the invention and that various changes and modifications may be made thereto without departing from the spirit and scope of the invention as defined in the appended claims. TABLE 1 M1197a REFRACTIVE ½ FREE LENSES RADII THICKNESSES GLASSES INDEX AT 157 nm DIAMETER 0 infinite 32.000000000 N2 1.00000320 54.410 infinite 3.386300000 N2 1.00000320 61.189 L101 331.163350000 17.963900000 CaF2 1.55840983 63.195     −319.616060000 1.476400000 N2 1.00000320 63.531 L102 766.337390000 17.162600000 CaF2 1.55840983 63.346 −447.357070000 0.750000000 N2 1.00000320 62.932 L103 308.080750000 26.167800000 CaF2 1.55840983 61.274     −256.921560000AS 0.781900000 N2 1.00000320 59.279 104     −199.459070000AS 7.000000000 CaF2 1.55840983 59.017 115.459900000 26.055700000 N2 1.00000320 53.978 L105 −155.555940000 7.000000000 CaF2 1.55840983 54.017 181.538670000 32.685400000 N2 1.00000320 57.637 L106 −105.047550000 7.623100000 CaF2 1.55840983 59.819     −6182.626690000AS 16.767300000 N2 1.00000320 74.788 L107 −441.263450000 27.098000000 CaF2 1.55840983 83.940 −151.990780000 2.318200000 N2 1.00000320 88.568 L108 −613.725250000 45.372400000 CaF2 1.55840983 103.501 −150.623730000 2.560000000 N2 1.00000320 107.663 L109 1648.391330000 42.538400000 CaF2 1.55840983 119.260 −255.166800000 2.852600000 N2 1.00000320 120.183 L110 154.432580000 47.915200000 CaF2 1.55840983 110.475 1162.400830000 0.929300000 N2 1.00000320 107.883 L111 261.100680000 20.383600000 CaF2 1.55840983 98.431      614.726380000AS 0.867900000 N2 1.00000320 93.917 L112 359.575500000 7.168800000 CaF2 1.55840983 89.668 126.930570000 40.754900000 N2 1.00000320 76.782 L113 −253.190760000 7.000000000 NAF 1.46483148 74.969 132.038930000 28.180300000 N2 1.00000320 67.606 L114 −338.990070000 7.611900000 NAF 1.46483148 67.535 222.374240000 39.202700000 N2 1.00000320 68.722 L115 −109.896940000 7.095700000 NAF 1.46483148 69.544 705.107390000 19.428900000 N2 1.00000320 84.312 L116 −706.158480000 29.677100000 LIF 1.47810153 90.890 −180.715990000 5.740400000 N2 1.00000320 95.248 L117 1725.475600000 35.904100000 LIF 1.47810153 112.495 −263.017160000 0.750000000 N2 1.00000320 114.191 L118 619.827930000 64.044600000 LIF 1.47810153 121.296 −197.026470000 0.750100000 N2 1.00000320 121.844 L119 −195.861770000 7.000000000 NAF 1.46483148 121.626 −469.620100000 0.750000000 N2 1.00000320 123.300 infinite 0.750600000 N2 1.00000320 122.405 L120 640.893310000 25.458500000 LIF 1.47810153 123.549 −1089.937900000 0.980400000 N2 1.00000320 123.525 L121 322.108140000 34.102200000 LIF 1.47810153 121.602 −1728.500990000 31.928200000 N2 1.00000320 120.573 L122 −234.494140000 46.273400000 CaF2 1.55840983 119.587 −251.236960000 0.974700000 N2 1.00000320 121.785 L123 171.211410000 29.502800000 LIF 1.47810153 103.953 452.301450000 0.887100000 N2 1.00000320 101.542 L124 126.180740000 28.831400000 LIF 1.47810153 88.565 223.894010000 0.796800000 N2 1.00000320 83.098 L125 132.333150000 25.819300000 LIF 1.47810153 76.140 477.745080000 6.457300000 N2 1.00000320 70.847 L126 infinite 59.682500000 CaF2 1.55840983 69.261 infinite 0.838600000 N2 1.00000320 33.343 L127 infinite 4.000000000 CaF2 1.55840983 32.211 infinite 12.000810000 N2 1.00000320 29.804 L128 infinite 0.000000000 13.603 ASPHERIC CONSTANTS Asphere of Lens L103 K −0.8141 C1 −1.93290250e−007 C2  4.16659320e−011 C3 −4.77885250e−015 C4  3.28605790e−019 C5 −1.03537910e−022 C6  2.397430106−026 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L104 K −1.0887 C1  1.574147606−008 C2  1.630995006−011 C3 −4.85048550e−015 C4  9.48501060e−019 C5 −2.37918310e−022 C6  3.606927006−026 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L106 K  4235.0115 C1  1.16160120e−007 C2 −1.37360280e−011 C3 −1.751817106−016 C4  1.569177506−019 C5 −1.57135270e−023 C6  5.89614270e−028 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L111 K  0.0000 C1  1.357825606−009 C2 −2.31506660e−013 C3  2.148311206−017 C4 −7.84495330e−022 C5 −4.23732680e−026 C6  1.17366430e−031 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000

[0092] TABLE 2 M1159a REFRACTIVE ½ FREE LENSES RADII THICKNESSES GLASSES INDEX AT 248.38 nm DIAMETER 0 infinite 32.000000000 Luft 0.99998200 54.410 infinite 0.750000000 Luft 0.99998200 61.498 L201 359.203085922 16.544139898 SIO2 1.50837298 62.894 −367.814285018 0.750000000 Luft 0.99998200 63.342 L202 376.906582229 16.424149202 SIO2 1.50837298 63.744 −370.266896435 0.750000000 Luft 0.99998200 63.552 L203 623.868133301 12.000921336 SIO2 1.50837298 62.201 −558.943539628 4.488271401 Luft 0.99998200 61.489 L204 −593.881163796 10.597937240 SIO2 1.50837298 60.233     −258.275165583AS 1.300130829 Luft 0.99998200 59.503 L205     −195.528496730AS 7.000000000 SIO2 1.50837298 59.067 114.970814112 27.465616009 Luft 0.99998200 54.855 L206 −150.593037892 7.000000000 SIO2 1.50837298 55.023 203.788990073 29.227930343 Luft 0.99998200 59.359 L207 −116.847756998 7.000000015 SIO2 1.50837298 60.888   −1029423.850607139AS 26.431412586 Luft 0.99998200 74.043 L208 −433.333706324 29.900058462 SIO2 1.50837298 89.733 −145.855178517 0.750000000 Luft 0.99998200 93.351 L209     −740.439232493AS 44.983538148 SIO2 1.50837298 108.655 −155.998681446 0.750000000 Luft 0.99998200 111.280 L210 730.369450038 38.596890643 SIO2 1.50837298 120.834 −339.830855552 0.750000000 Luft 0.99998200 121.150 L211 159.417768241 52.577878183 SIO2 1.50837298 112.765    457732.591606731AS 0.780542469 Luft 0.99998200 110.299 L212 190.812012094 23.738591831 SIO2 1.50837298 94.787 115.677643950 40.245663292 Luft 0.99998200 77.717 L213 −412.140976525 7.000000000 SIO2 1.50837298 76.256 151.701098214 27.102188582 Luft 0.99998200 69.619 L214 −319.487543080 7.000000000 SIO2 1.50837298 69.443 236.707933198 42.112032397 Luft 0.99998200 70.193 L215 −105.934259216 8.769693914 SIO2 1.50837298 71.068 680.231460994 17.681829203 Luft 0.99998200 88.650 L216 −517.056865132 36.235608441 SIO2 1.50837298 91.923 −185.271735391 0.764865888 Luft 0.99998200 100.651 L217 2262.402798068 44.431825566 SIO2 1.50837298 119.658 −267.329724617 8.198939895 Luft 0.99998200 123.247 L218 1103.186796189 40.827914599 SIO2 1.50837298 133.839 −364.593909045 8.280602730 Luft 0.99998200 134.570 infinite −3.250000000 Luft 0.99998200 133.180 L219 620.770366318 25.036239346 SIO2 1.50837298 134.241 −1858.943929157 0.750000000 Luft 0.99998200 134.164 L220 329.635686681 40.854820783 SIO2 1.50837298 132.227 −1181.581276955 31.972595866 Luft 0.99998200 131.156 L221 −249.799136729 10.000000000 SIO2 1.50837298 130.229 6484.262988004 5.619260320 Luft 0.99998200 130.672 L222 −2574.687141000 38.775298966 SIO2 1.50837298 130.696 −254.665255526 0.750000000 Luft 0.99998200 130.891 L223 203.341746230 25.409827006 SIO2 1.50837298 110.728 463.496973555 0.750000000 Luft 0.99998200 108.517 L224 118.263098967 37.247858671 SIO2 1.50837298 92.529 191.067427473 0.753637388 Luft 0.99998200 84.037 L225 137.671384625 24.859589811 SIO2 1.50837298 78.934 507.533271700 6.693359054 Luft 0.99998200 74.624 L226 infinite 55.768369688 SIO2 1.50837298 72.833 infinite 0.800000000 Luft 0.99998200 35.729 L227 infinite 4.000000000 SIO2 1.50837298 34.512 infinite 11.999970000 Luft 0.99998200 31.851 L228 infinite 0.000000000 1.00000000 13.602 ASPHERIC CONSTANTS Asphere of Lens L204 K −0.7780 C1 −1.91000417e−007 C2  4.02870297e−011 C3 −5.55434626e−015 C4  1.68245178e−019 C5  2.20604311e−023 C6  8.09599744e−027 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L205 K −0.4166 C1  5.25344324e−008 C2  1.26756433e−011 C3 −5.25489404e−015 C4  7.04023970e−019 C5 −1.045207666−022 C6  2.064548066−026 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L207 K −2116959451.7820 C1  1.251714766−007 C2 −1.53794245e−011 C3 −3.125325786−016 C4  2.009670356−019 C5 −2.050261246−023 C6  7.81326379e−028 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L211 K  0.0000 C1  2.78321477e−009 C2  5.898663356−014 C3  1.19811527e−017 C4 −7.811651496−022 C5  1.661110236−026 C6 −1.609654846−031 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000

[0093] TABLE 3 M1222a REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 248.380 nm DIAMETER 0 infinite 32.000000000 L710 54.410 infinite 0.750000000 L710 62.206 L301 12444.588054076 17.524945114 SIO2 1.50837298 62.427 −167.739069307 0.765384867 L710 0.99998200 63.213 L302 1202.845295516 8.943027554 SIO2 1.50837298 63.724 −1004.036633539 0.757676170 L710 0.99998200 63.750 L303 235.865591780 9.298971429 SIO2 1.50837298 63.464 231.568686620 24.888929767 L710 0.99998200 62.457 L304 −148.910928631 11.307968350 SIO2 1.50837298 62.393     −106.056725042AS 11.531057240 L710 0.99998200 63.087 L305     −135.467082619AS 7.000000000 SIO2 1.50837298 60.496 236.063635384 11.820516442 L710 0.99998200 61.104 L306 −1613.154189634 7.000000000 SIO2 1.50837298 61.565 222.732790977 38.103480975 L710 0.99998200 63.842 L307 −93.477889742 7.004909948 SIO2 1.50837298 64.855   10625258.126273967AS 25.183324680 L710 0.99998200 84.949 L308 −313.395232213 37.921288357 SIO2 1.50837298 94.853 −140.728421777 2.422311655 L710 0.99998200 102.129 L309     −882.714069478AS 62.983288381 SIO2 1.50837298 129.319 −162.454752849 0.750000000 L710 0.99998200 131.820 L310 372.954030958 61.566328910 SIO2 1.50837298 148.956 −446.221051696 0.750000000 L710 0.99998200 148.766 L311 159.626550846 68.423222152 SIO2 1.50837298 126.219     6881.817080351AS 0.754846049 L710 0.99998200 121.302 L312 1035.238560782 11.490813397 SIO2 1.50837298 116.908 181.491627420 22.008897360 L710 0.99998200 97.838 L313 508.638145894 7.024491847 SIO2 1.50837298 96.444 144.727315074 42.480962349 L710 0.99998200 85.818 L314 −315.769132147 7.000000000 SIO2 1.50837298 85.132      168.042488686AS 60.840114041 L710 0.99998200 82.384 L315 −110.641058959 7.000000000 SIO2 1.50837298 82.821 460.993264759 26.383956624 L710 0.99998200 108.073 L316 −573.887503383 33.664255268 SIO2 1.50837298 111.503 −189.203245467 0.750000000 L710 0.99998200 115.508 L317 −4374.531790288 33.200388364 SIO2 1.50837298 144.129 −365.840916872 0.750000000 L710 0.99998200 146.400 L318 5367.437754044 32.001020330 SIO2 1.50837298 162.024 −556.194479444 0.857496674 L710 0.99998200 163.414 L319 1425.923295786 68.540751990 SIO2 1.50837298 172.847 −318.608860176 8.280602730 L710 0.99998200 173.674 infinite −3.250000000 L710 0.99998200 165.236 L320 524.088279104 18.000000000 SIO2 1.50837298 164.278 896.107746530 0.750000000 L710 0.99998200 163.371 L321 447.468508944 50.493798307 SIO2 1.50837298 161.574 −849.886554129 37.700767601 L710 0.99998200 160.560 L322 −277.232722440 15.000000000 SIO2 1.50837298 159.396     −359.067701243AS 13.800352685 L710 0.99998200 159.582 L323     −283.705002828AS 20.143173981 SIO2 1.50837298 158.903 −264.293409160 0.750000000 L710 0.99998200 159.923 L324 182.924856302 28.086938401 SIO2 1.50837298 124.917 293.542915952 0.750000000 L710 0.99998200 122.142 L325 138.051507251 29.667601165 SIO2 1.50837298 107.973 206.495592035 4.518697859 L710 0.99998200 103.815 L326 137.608373914 37.703252491 SIO2 1.50837298 93.164     2008.206929102AS 6.230615100 L710 0.99998200 88.838 L327 79833.713358573 27.734587521 SIO2 1.50837298 83.516 infinite 5.000000000 L710 0.99998200 62.961 L328 infinite 25.000000000 SIO2 1.50837298 52.694 infinite 10.000000000 L710 0.99998200 34.137 L329 infinite 0.000000000 13.605 L710 = Air at 710 Torr ASPHERIC CONSTANTS Asphere of Lens L304 K −1.5058 C1 −1.86740544e−007 C2  3.71500406e−011 C3 −8.38153156e−015 C4  1.060344026−018 C5 −7.88993246e−023 C6  2.81358334e−027 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L305 K −1.3497 C1  9.592007106−008 C2  3.311878726−011 C3 −1.02270060e−014 C4  1.450488806−018 C5 −1.18276835e−022 C6  5.494461086−027 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L307 K -23427671857767355000000000000.0000 C1  1.13856265e−007 C2 −9.189100436−012 C3 −2.094829446−016 C4  8.754142696−020 C5 −6.716591586−024 C6  1.948961636−028 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L311 K  0.0000 C1  1.369874246−008 C2 −6.698206026−013 C3  2.249123736−017 C4 −5.165482786−022 C5  4.058323896−027 C6  3.250086596−032 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L314 K  0.0000 C1 −3.81602557e−009 C2 −1.32998252e−012 C3  0.00000000e+000 C4 −3.24422613e−021 C5  3.55600124e−025 C6 −2.11130790e−029 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L322 K  0.0000 C1  2.20018047e−011 C2 −6.06720907e−016 C3 −1.855443856−019 C4  1.99332533e−023 C5 −1.256158236−028 C6  5.720174946−033 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L323 K  0.0000 C1  2.59747415e−011 C2  1.158458706−015 C3  2.937920216−019 C4 −5.207531476−024 C5  5.15087863e−028 C6 −3.683613936−033 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L326 K  0.0000 C1  2.53574810e−008 C2  1.14136997e−012 C3 −2.098987736−016 C4  1.807719836−020 C5 −8.704589936−025 C6  1.837436066−029 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000

[0094] TABLE 4 M1450a REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 193.304 nm DIAMETER 0 infinite 32.000000000 L710 0.99998200 54.410 infinite 0.700000000 L710 0.99998200 61.369 L401     1072.135967906AS 17.638366552 SIO2 1.56028895 62.176 −274.850778792 10.038841436 HE 0.99971200 62.804 L402 −195.160258125 9.677862773 SIO2 1.56028895 62.822 −159.034954419 15.411706951 HE 0.99971200 63.649 L403 −409.040910955 11.634800854 SIO2 1.56028895 62.424 −184.929247238 18.878098976 HE 0.99971200 62.549 L404 −86.928681017 9.000000000 SIO2 1.56028895 61.870     −81.003682870AS 3.559685814 HE 0.99971200 63.469 L405     −105.055795110AS 6.000000000 SIO2 1.56028895 60.375 −237.059668556 7.135710642 HE 0.99971200 61.325 L406 −170.390902140 6.000000000 SIO2 1.56028895 61.152 179.617978310 40.187039625 HE 0.99971200 64.312 L407 −108.910057000 6.000000000 SIO2 1.56028895 66.769     10000.000000000AS 23.032466424 HE 0.99971200 84.010 L408 −482.423484275 35.657870541 SIO2 1.56028895 98.271 −166.024534852 0.712083613 HE 0.99971200 104.636 L409     −5301.825985682AS 59.184134830 SIO2 1.56028895 129.868 −219.603781546 1.964238192 HE 0.99971200 135.616 L410 −407.514819861 25.000000000 SIO2 1.56028895 141.192 −275.650807138 2.073256156 HE 0.99971200 143.933 L411 812.482278880 41.728126549 SIO2 1.56028895 150.437 2085.321083022 11.867512800 HE 0.99971200 150.588 L412 1989.395979432 66.189720990 SIO2 1.56028895 151.170 −336.825131023 2.208063283 HE 0.99971200 151.249 L413 161.751335222 66.140524993 SIO2 1.56028895 121.860     −7743.125302019AS 0.732008617 HE 0.99971200 115.257 L414 2700.830058670 8.000000000 SIO2 1.56028895 112.928 175.482298866 18.681794864 HE 0.99971200 94.204 L415 330.479176880 8.000000000 SIO2 1.56028895 91.933 215.492418517 37.734500801 HE 0.99971200 86.259 L416 −263.077268094 6.000000000 SIO2 1.56028895 83.596      119.453498304AS 66.406324570 HE 0.99971200 77.915 L417 −126.431526615 6.000000000 SIO2 1.56028895 80.395 1627.715124622 24.178532080 HE 0.99971200 96.410 L418 −517.066851877 30.987035837 SIO2 1.56028895 105.371 −242.666474401 0.700000000 HE 0.99971200 113.249 L419 −737.673536297 30.292644418 SIO2 1.56028895 124.350 −270.925750340 0.700000000 HE 0.99971200 128.112 L420 −1051.979110054 27.301344542 SIO2 1.56028895 137.231 −363.545320262 0.711035404 HE 0.99971200 139.644 L421 914.456821676 50.497126159 SIO2 1.56028895 148.531 −500.741001160 10.000000000 HE 0.99971200 149.700 L422 infinite −5.000000000 HE 0.99971200 146.693      353.826401507AS 22.748234242 SIO2 1.56028895 147.721 L423 529.864238000 1.376970242 HE 0.99971200 146.294 422.718681400 57.709521396 SIO2 1.56028895 146.003 L424 −733.506899438 37.321473463 HE 0.99971200 143.238 −261.264462802 15.000000000 SIO2 1.56028895 138.711 L425     −292.145870649AS 18.942285163 HE 0.99971200 139.089     −225.638240671AS 19.098948274 SIO2 1.56028895 136.464 L426     −230.537827019 0.700000000 HE 0.99971200 138.299 246.284141218 23.038665896 SIO2 1.56028895 114.892 L427 400.381469987 0.704537226 HE 0.99971200 110.931 131.458744675 28.653621426 SIO2 1.56028895 98.090 L428 200.500973816 0.708148286 HE 0.99971200 93.130 139.428371855 36.540725215 SIO2 1.56028895 87.103 L429     1188.104646109AS 8.107454155 HE 0.99971200 79.764 infinite 25.934594077 CaF2 1.50143563 72.791 L430 infinite 5.000000000 L710 0.99998200 54.980 infinite 25.000000000 CAF2HL 1.50143563 46.911 L431 infinite 10.000000000 L710 0.99998200 29.741 infinite 0.000000000 13.603 L710 = Air at 710 Torr ASPHERIC CONSTANTS Asphere of Lens L401 K  0.0000 C1  7.64628377e−008 C2  6.87967706e−013 C3  6.32367166e−017 C4  4.65534082e−020 C5 −1.74760583e−023 C6  3.25143184e−027 C7 −2.97366674e−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L404 K −1.3306 C1 −2.46704917e−007 C2  1.00943626e−011 C3 −6.88338440e−015 C4  1.00927351e−018 C5 −1.37371749e−022 C6  9.94732480e−027 C7 −6.461271956−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L405 K −1.1682 C1  8.44108642e−008 C2  6.67934072e−012 C3 −5.160530496−015 C4  8.518351786−019 C5 −9.37525700e−023 C6  3.80738193e−027 C7 −7.58518933e−035 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L407 K  0.0000 C1  8.18369639e−008 C2 −9.75131236e−012 C3  3.85197305e−016 C4  1.05024918e−020 C5 −3.84907914e−024 C6  3.28329458e−028 C7 −1.16692413e−032 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L409 K  0.0000 C1  4.21547093e−009 C2 −2.05810358e−013 C3 −2.19266732e−018 C4 −7.839591766−023 C5  6.55613544e−027 C6 −7.33103571e−032 C7 −2.154614196−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L413 K  0.0000 C1  1.39800416e−008 C2 −1.91505190e−013 C3 −1.267820086−017 C4  9.93778200e−022 C5 −5.558243426−026 C6  1.85230750e−030 C7 −2.83026055e−035 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L416 K  0.0000 C1 −1.87949694e−008 C2 −4.87119675e−012 C3 −5.900093676−017 C4 −5.767495306−021 C5 −3.071896726−025 C6  4.51160541e−029 C7 −5.020373646−033 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L421 K −0.0073 C1  1.63581145e−010 C2 −7.80915457e−015 C3  6.72460331e−021 C4  5.334797196−025 C5  2.821441856−028 C6 −6.16219372e−033 C7  2.371575626−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L424 K  0.0000 C1  1.28367898e−010 C2 −1.18938455e−014 C3 −1.847142196−019 C4  4.28587779e−023 C5 −1.392135796−027 C6  2.048837186−032 C7 −3.362015846−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L425 K  0.0000 C1 −2.31584329e−010 C2  2.470131626−014 C3  1.139287516−018 C4 −1.249978266−023 C5 −9.596539196−028 C6  1.46403755e−032 C7 −1.23684921e−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L428 K  0.0000 C1  2.79193914e−008 C2  5.723259856−013 C3 −1.691562626−016 C4  1.45062961e−020 C5 −7.241576876−025 C6  1.59130857e−029 C7  9.07975701e−035 C8  0.00000000e+000 C9  0.00000000e+000

[0095] TABLE 5 M1558a REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 193.304 nm DIAMETER 0 infinite 32.000000000 L710 0.99998200 54.410 infinite 0.700000000 L710 0.99998200 61.800 L501     1062.826934956AS 17.734965551 SIO2 1.56028895 62.680 −280.649155373 9.921059017 HE 0.99971200 63.358 L502 −198.612797944 9.733545477 SIO2 1.56028895 63.454 −157.546275141 15.417407860 HE 0.99971200 64.281 L503 −400.277413338 11.803054495 SIO2 1.56028895 63.163 −182.515287485 19.059582585 HE 0.99971200 63.316 L504 −86.486413985 9.000000000 SIO2 1.56028895 62.723      −79.976798205AS 3.314115561 HE 0.99971200 64.356 L505     −102.262183494AS 6.000000000 SIO2 1.56028895 61.260 −275.242312561 7.844485351 HE 0.99971200 62.494 L506 −191.274205909 6.000000000 SIO2 1.56028895 62.450 180.723494008 40.175681177 HE 0.99971200 65.811 L507 −108.539011643 6.000000000 SIO2 1.56028895 67.752     10000.000000000AS 23.009626916 HE 0.99971200 86.379 L508 −481.040730284 35.657298256 SIO2 1.56028895 100.931 −165.828518942 0.700000000 HE 0.99971200 106.719 L509     −5243.952853546AS 59.233771719 SIO2 1.56028895 134.666 −218.541408733 2.123657562 HE 0.99971200 139.441 L510 −402.136827778 25.000000000 SIO2 1.56028895 145.856 −276.854279724 1.637353303 HE 0.99971200 148.618 L511 796.304534481 36.805305429 SIO2 1.56028895 156.741 2360.950907095 10.808883416 HE 0.99971200 157.059 L512 2256.926430541 60.789786196 SIO2 1.56028895 157.684 −336.450738373 0.801676910 HE 0.99971200 157.856 L513 161.617552542 66.152351274 SIO2 1.56028895 125.624     −6835.350709889AS 0.744366824 HE 0.99971200 121.362 L514 2851.162473443 8.000000000 SIO2 1.56028895 118.726 173.208226906 18.750820117 HE 0.99971200 97.559 L515 318.351302869 8.000000000 SIO2 1.56028895 95.703 214.643166184 38.151364608 HE 0.99971200 89.760 L516 −261.549915460 6.000000000 SIO2 1.56028895 88.331      119.510683982AS 66.550546342 HE 0.99971200 82.116 L517 −126.322271364 6.000000000 SIO2 1.56028895 83.464 1722.207555551 24.185704173 HE 0.99971200 102.415 L518 −506.819064828 30.988960270 SIO2 1.56028895 111.113 −242.042046428 0.700000000 HE 0.99971200 118.861 L519 −728.789614455 30.297084361 SIO2 1.56028895 132.704 −269.518093553 0.700000000 HE 0.99971200 135.576 L520 −1024.754284774 27.306923440 SIO2 1.56028895 147.201 −361.037355343 0.700000000 HE 0.99971200 149.061 L521 929.096482269 49.082091976 SIO2 1.56028895 161.109 −497.886578908 15.000000000 HE 0.99971200 161.854 infinite −10.000000000 HE 0.99971200 158.597 L522      352.973470359AS 22.735479730 SIO2 1.56028895 159.957 529.864238000 1.119499649 HE 0.99971200 158.688 L523 422.718681400 57.532074113 SIO2 1.56028895 158.278 −733.230538894 37.317449332 HE 0.99971200 156.533 L524 −261.165349728 15.000000000 SIO2 1.56028895 155.119     −292.119447959AS 18.962883498 HE 0.99971200 156.043 L525     −226.263316842AS 19.009003051 SIO2 1.56028895 155.000 −231.163516914 0.700000000 HE 0.99971200 157.710 L526 245.306778718 23.024380018 SIO2 1.56028895 124.547 403.694577141 0.700000000 HE 0.99971200 121.262 L527 132.188567375 28.647981266 SIO2 1.56028895 104.696 199.679919884 0.700019350 HE 0.99971200 101.254 L528 138.967602414 36.537553325 SIO2 1.56028895 93.617     1194.093826692AS 8.108769689 HE 0.99971200 89.148 L529 infinite 25.923824338 CaF2 1.50143563 82.715 infinite 5.000000000 L710 0.99998200 63.301 L530 infinite 25.000000000 CaF2 1.50143563 52.976 infinite 10.000000000 L710 0.99998200 34.253 L531 infinite 0.000000000 13.603 L710 = Air at 710 Torr ASPHERIC CONSTANTS Asphere of Lens L501 K  0.0000 C1  7.79889739e−008 C2  5.96475035e−013 C3  5.73397945e−017 C4  5.386004056−020 C5 −2.081451886−023 C6  4.05094979e−027 C7 −3.791329836−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L504 K −1.3308 C1 −2.466334506−007 C2  1.004468066−011 C3 −7.006868986−015 C4  9.90840734e−019 C5 −1.31781718e−022 C6  9.28901869e−027 C7 −6.52628587e−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L505 K −1.1513 C1  8.27765089e−008 C2  7.00992841e−012 C3 −5.198257626−015 C4  8.12467102e−019 C5 −8.318059136−023 C6  2.189257116−027 C7  1.11778799e−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L507 K  0.0000 C1  8.22829380e−008 C2 −9.72735758e−012 C3  3.856437536−016 C4  1.011143146−020 C5 −3.91221853e−024 C6  3.397327816−028 C7 −1.201353136−032 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L509 K  0.0000 C1  4.14637283e−009 C2 −2.13253257e−013 C3 −2.08003643e−018 C4 −7.83152213e−023 C5  5.30015388e−027 C6 −2.59321154e−033 C7 −3.370007586−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L513 K  0.0000 C1  1.39567662e−008 C2 −2.05760928e−013 C3 −1.29919990e−017 C4  1.003024556−021 C5 −5.58828742e−026 C6  1.79594589e−030 C7 −2.49374487e−035 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L516 K  0.0000 C1 −1.82058286e−008 C2 −4.87410470e−012 C3 −5.89919068e−017 C4 −4.04061992e−021 C5 −6.60202054e−025 C6  9.31855676e−029 C7 −7.48573635e−033 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L522 K −0.0071 C1  1.64455895e−010 C2 −7.76483415e−015 C3  8.292568736−021 C4 −5.46990406e−025 C5  3.42070772e−028 C6 −8.24545949e−033 C7  2.57783363e−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L524 K  0.0000 C1  1.18780021e−010 C2 −1.18823445e−014 C3 −1.801622466−019 C4  4.083432136−023 C5 −1.427354076−027 C6  2.348043316−032 C7 −3.790185236−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L525 K  0.0000 C1 −2.155608956−010 C2  2.449292816−014 C3  1.123593066−018 C4 −1.297499106−023 C5 −1.001063996−027 C6  1.881654716−032 C7 −2.015577236−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L528 K  0.0000 C1  2.73896476e−008 C2  6.17281255e−013 C3 −1.754749026−016 C4  1.56329449e−020 C5 −8.82259694e−025 C6  2.92948124e−029 C7 −4.01055770e−034 C8  0.00000000e+000 C9  0.00000000e+000

[0096] TABLE 6 M1587a REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 157.629 nm DIAMETER 0 infinite 27.171475840 N2 1.00031429 46.200 infinite 0.602670797 N2 1.00031429 52.673 L601      900.198243311AS 15.151284556 CaF2 1.55929035 53.454 −235.121108435 9.531971079 N2 1.00031429 54.049 L602 −167.185917779 8.294716452 CaF2 1.55929035 54.178 −132.673519510 14.020355779 N2 1.00031429 54.901 L603 −333.194588652 9.893809820 CaF2 1.55929035 53.988 −155.450516203 15.930502944 N2 1.00031429 54.132 L604 −73.572316296 7.641977580 CaF2 1.55929035 53.748      −68.248613899AS 2.881720302 N2 1.00031429 55.167 L605      −86.993585564AS 5.094651720 CaF2 1.55929035 52.580 −238.150965327 5.379130780 N2 1.00031429 53.729 L606 −165.613920870 5.094651720 CaF2 1.55929035 53.730 153.417884485 34.150169591 N2 1.00031429 56.762 L607 −92.061009990 5.094651720 CaF2 1.55929035 58.081     8491.086261873AS 19.673523795 N2 1.00031429 74.689 L608 −407.131300451 30.380807138 CaF2 1.55929035 87.291 −140.620317156 0.761662684 N2 1.00031429 91.858 L609     −4831.804853654AS 50.269660218 CaF2 1.55929035 117.436 −192.197373609 1.688916911 N2 1.00031429 121.408 L610 −367.718684892 21.227715500 CaF2 1.55929035 127.704 −233.628547894 2.224071019 N2 1.00031429 129.305 L611 709.585855080 28.736922725 CaF2 1.55929035 137.016 1238.859445357 9.120684720 N2 1.00031429 137.428 L612 1205.457051945 49.281218258 CaF2 1.55929035 138.288 −285.321880705 1.625271224 N2 1.00031429 138.379 L613 137.549591710 56.718543740 CaF2 1.55929035 108.652     −4380.301012978AS 0.623523902 N2 1.00031429 106.138 L614 2663.880214408 6.792868960 CaF2 1.55929035 103.602 149.184979730 15.779049257 N2 1.00031429 84.589 L615 281.093108064 6.792868960 CaF2 1.55929035 83.373 184.030288413 32.341552355 N2 1.00031429 77.968 L616 −222.157416308 5.094651720 CaF2 1.55929035 77.463      101.254238115AS 56.792834221 N2 1.00031429 71.826 L617 −106.980638018 5.094651720 CaF2 1.55929035 72.237 1612.305471130 20.581065398 N2 1.00031429 89.760 L618 −415.596135628 26.398111993 CaF2 1.55929035 96.803 −204.680044631 0.713343960 N2 1.00031429 103.409 L619 −646.696622394 25.867340760 CaF2 1.55929035 116.636 −231.917626896 0.766268682 N2 1.00031429 118.569 L620 −790.657607677 23.400482872 CaF2 1.55929035 128.806 −294.872053725 0.721402031 N2 1.00031429 130.074 L621 786.625567756 40.932308205 CaF2 1.55929035 141.705 −431.247283013 12.736629300 N2 1.00031429 142.089 infinite −8.491086200 N2 1.00031429 134.586 L622      295.022653593AS 20.185109438 CaF2 1.55929035 139.341 449.912291916 0.619840486 N2 1.00031429 137.916 L623 358.934076212 48.662890509 CaF2 1.55929035 136.936 − −622.662988878 30.955714157 N2 1.00031429 135.288 L624 −224.404889753 12.736629300 CaF2 1.55929035 134.760     −251.154571510AS 16.079850229 N2 1.00031429 134.853 L625     −193.582989843AS 16.510083506 CaF2 1.55929035 134.101 −198.077570749 0.880353872 N2 1.00031429 136.109 L626 206.241795157 19.927993542 CaF2 1.55929035 101.240 338.140581666 0.925956949 N2 1.00031429 97.594 L627 111.017549581 24.580089962 CaF2 1.55929035 85.023 169.576109839 0.777849447 N2 1.00031429 81.164 L628 117.982165264 31.161065630 CaF2 1.55929035 75.464      921.219058213AS 6.934980174 N2 1.00031429 69.501 L629 infinite 22.260797322 CaF2 1.55929035 63.637 infinite 4.245543100 N2 1.00031429 48.606 L630 infinite 21.227715500 CaF2 1.55929035 41.032 infinite 8.491086200 N2 1.00031429 26.698 infinite 0.000000000 1.00000000 11.550 Wavelength and refractive index are given referred to Vacuum. ASPHERIC CONSTANTS Asphere of Lens L601 K  0.0000 C1  1.28594437e−007 C2  8.50731836e−013 C3  1.163756206−016 C4  2.28674275e−019 C5 −1.23202729e−022 C6  3.320562396−026 C7 −4.283233896−030 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L604 K −1.3312 C1 −4.03355456e−007 C2  2.25776586e−011 C3 −2.19259878e−014 C4  4.32573397e−018 C5 −7.924771596−022 C6  7.576188746−026 C7 −7.149627976−030 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L605 K −1.1417 C1  1.33637337e−007 C2  1.567877586−011 C3 −1.64362484e−014 C4  3.59793786e−018 C5 −5.11312568e−022 C6  1.70636633e−026 C7  1.823847316−030 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L607 K  0.0000 C1  1.34745120e−007 C2 −2.198075436−011 C3  1.202758816−015 C4  4.39597377e−020 C5 −2.37132819e−023 C6  2.875109396−027 C7 −1.420651626−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L609 K  0.0000 C1  6.85760526e−009 C2 −4.84524868e−013 C3 −6.287513506−018 C4 −3.72607209e−022 C5  3.25276841e−026 C6 −4.055099746−033 C7 −3.988430796−035 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L613 K  0.0000 C1  2.24737416e−008 C2 −4.45043770e−013 C3 −4.102720496−017 C4  4.31632628e−021 C5 −3.275382376−025 C6  1.440530256−029 C7 −2.76858490e−034 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L616 K  0.0000 C1 −2.83553693e−008 C2 −1.121222616−011 C3 −2.05192812e−016 C4 −1.555250806−020 C5 −4.770931126−024 C6  8.39331135e−028 C7 −8.973136816−032 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L622 K  0.0421 C1  7.07310826e−010 C2 −2.001571856−014 C3 −9.33825109e−020 C4  1.27125854e−024 C5  1.94008709e−027 C6 −6.119898586−032 C7  2.923673226−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L624 K  0.0000 C1  3.02835805e−010 C2 −2.40484062e−014 C3 −3.223391896−019 C4  1.64516979e−022 C5 −8.51268614e−027 C6  2.09276792e−031 C7 −4.746056696−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L625 K  0.0000 C1 −3.992489936−010 C2  5.79276562e−014 C3  3.53241478e−018 C4 −4.57872308e−023 C5 −6.29695208e−027 C6  1.57844931e−031 C7 −2.19266130e−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L628 K  0.0000 C1  4.40737732e−008 C2  1.52385268e−012 C3 −5.44510329e−016 C4  6.325497896−020 C5 −4.583582036−024 C6  1.92230388e−028 C7 −3.113112586−033 C8  0.00000000e+000 C9  0.00000000e+000

[0097] TABLE 7 M1630a REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 193.304 nm DIAMETER 0 infinite 32.989007360 L710 0.99998200 56.080 infinite 2.050119724 L710 0.99998200 63.700 L701     1292.577885893AS 17.083079028 SIO2 1.56028895 64.846 −320.912994055 6.356545111 HE 0.99971200 65.549 L702 −222.076099367 9.996105426 SIO2 1.56028895 65.651 −173.186007383 14.918724377 HE 0.99971200 66.515 L703 −465.289541055 12.849128877 SIO2 1.56028895 65.892 −190.575077708 24.825544140 HE 0.99971200 66.089 L704 −88.003869940 9.278158320 SIO2 1.56028895 64.773      −80.342454766AS 3.110021891 HE 0.99971200 66.529 L705     −104.692897461AS 6.185438880 SIO2 1.56028895 63.593 687.929853355 8.052826671 HE 0.99971200 65.986 L706 −4211.039282601 6.185438880 SIO2 1.56028895 66.833 191.063416206 42.178241931 HE 0.99971200 69.389 L707 −115.620656932 6.185438880 SIO2 1.56028895 71.596     10919.608812170AS 23.544585745 HE 0.99971200 91.649 L708 −462.245785462 36.857934334 SIO2 1.56028895 105.419 −166.710127403 0.922637637 HE 0.99971200 110.921 L709     −2362.175430424AS 61.803635845 SIO2 1.56028895 140.744 −209.701792909 1.020714627 HE 0.99971200 144.651 L710 −389.602200799 25.772662000 SIO2 1.56028895 151.693 −307.008965979 0.721634536 HE 0.99971200 156.014 L711 629.229001456 46.511934207 SIO2 1.56028895 167.044 −859.369679090 24.151857437 HE 0.99971200 167.077 L712 −877.205712077 30.754166393 SIO2 1.56028895 164.429 −357.572652646 4.953800031 HE 0.99971200 164.440 L713 168.111512940 68.382989629 SIO2 1.56028895 129.450 infinite 0.000000000 HE 0.99971200 125.021 L714 infinite 8.247251840 SIO2 1.56028895 125.021      149.672876100AS 23.428435757 HE 0.99971200 98.364 L715 167.316121704 0.000000000 SIO2 1.56028895 92.117 167.316121704 46.368104843 HE 0.99971200 92.117 L716 −276.014955570 6.185438880 SIO2 1.56028895 90.583      122.032488640AS 68.057116286 HE 0.99971200 84.260 L717 −131.026926440 6.185438880 SIO2 1.56028895 85.665 1443.442379280 24.936997937 HE 0.99971200 105.177 L718 −570.720178737 31.985422479 SIO2 1.56028895 114.725 −251.966065824 0.742435413 HE 0.99971200 122.318 L719. −792.022948046 31.395737994 SIO2 1.56028895 136.726 −284.699402375 0.732480789 HE 0.99971200 139.887 L720− −1399.942577177 28.528105133 SIO2 1.56028895 152.678 −405.074653331 0.721634536 HE 0.99971200 154.617 L721 969.181518515 52.876050649 SIO2 1.56028895 166.429 −498.113891823 15.463597200 HE 0.99971200 167.335 infinite −10.309064800 HE 0.99971200 163.661 L722      369.912797108AS 22.457291722 SIO2 1.56028895 164.702 546.240476474 0.759815621 HE 0.99971200 163.421 L723 435.783427872 59.712335014 SIO2 1.56028895 163.043 −757.138748183 38.604277894 HE 0.99971200 161.173 L724 −268.662949002 15.463597200 SIO2 1.56028895 159.696     −299.983850179AS 20.130367113 HE 0.99971200 160.684 L725     −232.880394011AS 19.892839003 SIO2 1.56028895 159.263 −238.077482924 0.721634536 HE 0.99971200 162.099 L726 238.488298578 23.631362631 SIO2 1.56028895 127.621 378.766536032 0.721634536 HE 0.99971200 124.291 L727 136.105324171 29.608483074 SIO2 1.56028895 108.001 205.107042559 0.785819222 HE 0.99971200 104.429 L728 143.303538802 37.757018324 SIO2 1.56028895 96.584     1247.979376087AS 8.449273703 HE 0.99971200 91.946 L729 infinite 26.717587971 CaF2 1.50143563 85.145 infinite 5.154532400 L710 0.99998200 65.152 L730 infinite 25.772662000 CaF2 1.50143563 54.537 infinite 10.309064800 L710 0.99998200 35.251 L731 infinite 0.000000000 14.020 L710 = Air at 710 Torr ASPHERIC CONSTANTS Asphere of Lens L701 K  0.0000 C1  6.70377274e−008 C2  6.84099199e−013 C3  1.05733405e−016 C4  3.373494536−020 C5 −7.157055476−024 C6  5.097862036−028 C7 −6.46970874e−033 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L704 K −1.3610 C1 −2.19369509e−007 C2  7.67800088e−012 C3 −6.077968756−015 C4  7.906458566−019 C5 −9.111125006−023 C6  5.688853546−027 C7 −4.264634816−031 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L705 K −1.2060 C1  8.09444891e−008 C2  4.80824558e−012 C3 −4.203736036−015 C4  5.60648644e−019 C5 −4.515203306−023 C6  1.545051886−027 C7  5.007411616−032 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L707 K  0.0000 C1  7.634551536−008 C2 −8.56292259e−012 C3  3.016695696−016 C4  9.61573017e−021 C5 −2.675882166−024 C6  2.05728418e−028 C7 −6.45595651e−033 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L709 K  0.0000 C1  3.23214391e−009 C2 −1.67326019e−013 C3 −4.26702152e−019 C4 −5.66712884e−023 C5 −1.242567046−028 C6  1.641247266−031 C7 −4.41379927e−036 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L714 K  0.0000 C1 −1.637539266−009 C2  2.54837542e−013 C3  8.794300556−018 C4  9.191272136−022 C5 −7.019509326−026 C6  1.17918461e−029 C7 −8.743087636−034 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L716 K  0.0000 C1 −1.547253136−008 C2 −4.262754766−012 C3 −1.014842756−016 C4  8.378434266−022 C5 −1.292021676−024 C6  1.718200446−028 C7 −1.053353306−032 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L722 K −0.0331 C1  2.56540619e−011 C2 −6.98183157e−015 C3  7.92101859e−021 C4 −5.858075696−025 C5  2.42288782e−028 C6 −5.79467899e−033 C7  1.636891326−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L724 K  0.0000 C1  8.90820785e−011 C2 −1.06772804e−014 C3 −1.68281363e−019 C4  3.048280216−023 C5 −1.01185483e−027 C6  1.61617917e−032 C7 −2.405827296−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L725 K  0.0000 C1 −1.977576406−010 C2  2.05110497e−014 C3  8.96864099e−019 C4 −9.85543257e−024 C5 −7.12993590e−028 C6  1.30146671e−032 C7 −1.36102788e−037 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L728 K  0.0000 C1  2.55097376e−008 C2  5.47467657e−013 C3 −1.435687136−016 C4  1.17677649e−020 C5 −5.95320448e−025 C6  1.71763367e−029 C7 −1.94556007e−034 C8  0.00000000e+000 C9  0.00000000e+000

[0098] TABLE 8 L61 REFRACTIVE INDEX ½ FREE LENSES RADII THICKNESSES GLASSES AT 157.13 nm DIAMETER 0 infinite 34.000000000 1.00000000 82.150 infinite 0.100000000 1.00000000 87.654 L801 276.724757380 40.000000000 CaF2 1.55970990 90.112     1413.944109416AS 95.000000000 1.00000000 89.442 SP1 infinite 11.000000000 1.00000000 90.034 infinite 433.237005445 1.00000000 90.104 L802 −195.924336384 17.295305525 CaF2 1.55970990 92.746 −467.658808527 40.841112468 1.00000000 98.732 L803 −241.385736441 15.977235467 CaF2 1.55970990 105.512     −857.211727400AS 21.649331094 1.00000000 118.786 SP2 infinite 0.000010000 1.00000000 139.325 253.074839896 21.649331094 1.00000000 119.350 L803′      857.211727400AS 15.977235467 CaF2 1.55970990 118.986 241.385736441 40.841112468 1.00000000 108.546 L802′ 467.658808527 17.295305525 CaF2 1.55970990 102.615 195.924336384 419.981357165 1.00000000 95.689 SP3 infinite 6.255658280 1.00000000 76.370 infinite 42.609155219 1.00000000 76.064 Z1 infinite 67.449547115 1.00000000 73.981 L804 432.544479547 37.784311058 CaF2 1.55970990 90.274 −522.188532471 113.756133662 1.00000000 92.507 L805 −263.167605725 33.768525968 CaF2 1.55970990 100.053     −291.940616829AS 14.536591424 1.00000000 106.516 L806      589.642961222AS 20.449887046 CaF2 1.55970990 110.482 −5539.698828792 443.944079795 1.00000000 110.523 L807 221.780582003 9.000000000 CaF2 1.55970990 108.311 153.071443064 22.790060084 1.00000000 104.062 L808 309.446967518 38.542735318 CaF2 1.55970990 104.062 −2660.227900099 0.100022286 1.00000000 104.098 L809 23655.354584194 12.899131182 CaF2 1.55970990 104.054 −1473.189213176 9.318886362 1.00000000 103.931 L810 −652.136459374 16.359499814 CaF2 1.55970990 103.644 −446.489459129 0.100000000 1.00000000 103.877 L811 174.593507050 25.900313780 CaF2 1.55970990 99.267      392.239615259AS 14.064505431 1.00000000 96.610 infinite 2.045119392 1.00000000 96.552 L812 7497.306838492 16.759051656 CaF2 1.55970990 96.383 318.210831711 8.891640764 1.00000000 94.998 L813 428.724465129 41.295806263 CaF2 1.55970990 95.548     3290.097860119AS 7.377912006 1.00000000 95.040 L814 721.012739719 33.927118706 CaF2 1.55970990 95.443 −272.650872353 6.871397517 1.00000000 95.207 L815 131.257556743 38.826450065 CaF2 1.55970990 81.345      632.112566477AS 4.409527396 1.00000000 74.847 L816      342.127616157AS 37.346293509 CaF2 1.55970990 70.394 449.261078744 4.859754445 1.00000000 54.895 L817 144.034814702 34.792179308 CaF2 1.55970990 48.040     −751.263321098AS 11.999872684 1.00000000 33.475 0′ infinite 0.000127776 1.00000000 16.430 ASPHERIC CONSTANTS Asphere of Lens L801 K  0.0000 C1  4.90231706e−009 C2  3.08634889e−014 C3 −9.53005325e−019 C4 −6.06316417e−024 C5  6.11462814e−028 C6 −8.64346302e−032 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L803 K  0.0000 C1 −5.33460884e−009 C2  9.73867225e−014 C3 −3.284220586−018 C4  1.50550421e−022 C5  0.00000000e+000 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L803′ K  0.0000 C1  5.33460884e−009 C2 −9.73867225e−014 C3  3.28422058e−018 C4 −1.505504216−022 C5  0.00000000e+000 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L805 K  0.0000 C1  2.42569449e−009 C2  3.961378656−014 C3 −2.47855149e−018 C4  7.95092779e−023 C5  0.00000000e+000 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L806 K  0.0000 C1 −6.74111232e−009 C2 −2.57289693e−014 C3 −2.81309020e−018 C4  6.70057831e−023 C5  5.062723446−028 C6 −4.81282974e−032 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L811 K  0.0000 C1  2.28889624e−008 C2 −1.88390559e−014 C3  2.86010656e−017 C4 −3.185753366−021 C5  1.45886017e−025 C6 −1.08492931e−029 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L813 K  0.0000 C1  3.40212872e−008 C2 −1.080088776−012 C3  4.33814531e−017 C4 −7.40125614e−021 C5  5.66856812e−025 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L815 K  0.0000 C1 −3.15395039e−008 C2  4.300101336−012 C3  3.11663337e−016 C4 −3.640897696−020 C5  1.06073268e−024 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L816 K  0.0000 C1 −2.16574623e−008 C2 −6.67182801e−013 C3  4.465199326−016 C4 −3.715715356−020 C5  0.00000000e+000 C6  0.00000000e+000 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 Asphere of Lens L817 K  0.0000 C1  2.15121397e−008 C2 −1.653017266−011 C3 −5.03883747e−015 C4  1.034418156−017 C5 −6.29122773e−021 C6  1.440977146−024 C7  0.00000000e+000 C8  0.00000000e+000 C9  0.00000000e+000 

1-27. (Cancelled).
 28. Previously Presented A projection exposure system defining an optical axis and comprising: an illuminating unit mounted on said optical axis for transmitting a light beam along said optical axis; a projection objective arranged on said optical axis downstream of said illuminating unit; a mask held in the beam path of said light beam between said illuminating unit and said projection objective; a substrate holder for holding a substrate in said beam path downstream of said projection objective; and, said projection objective defining a maximum lens diameter and including: a plurality of lenses defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; said double asphere being mounted at a distance from said image plane corresponding at least to said maximum lens diameter; the lenses of said double asphere defining a mean lens diameter; and, said mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of said mean lens diameter.
 29. A method of making a microstructured component utilizing a projection exposure system including an illuminating unit mounted on said optical axis for transmitting a light beam along said optical axis; a projection objective arranged on said optical axis downstream of said illuminating unit; a mask held in the beam path of said light beam between said illuminating unit and said projection objective and said mask holding a pattern; a substrate holder for holding a substrate in said beam path downstream of said projection objective; and, said projection objective defining a maximum lens diameter and including: a plurality of lenses defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; said double asphere being mounted at a distance from said image plane corresponding at least to said maximum lens diameter; the lenses of said double asphere defining a mean lens diameter; and, said mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of said mean lens diameter, the method comprising the steps of: providing said substrate as a substrate having a light-sensitive layer thereon; holding said substrate in said beam path exposing said light-sensitive layer with ultraviolet laser light from said illuminating unit; and, developing the exposed light-sensitive layer to structure said substrate to have said pattern of said mask.
 30. A refractive projection objective comprising: two lens groups of negative refractive power; at least one of said lens groups of negative refractive power including only two lenses of negative refractive power; the other one of said lens groups of negative refractive power having maximally two lenses of negative refractive power; and, said lens groups defining at least two constrictions and an aspheric lens surface is arranged in the second constriction.
 31. The refractive projection objective of claim 30, further comprising a lens group of positive refractive power including at least one lens having an aspheric surface; and, a diaphragm mounted in said lens group of positive refractive power.
 32. The refractive projection objective of claim 30, further comprising at least two lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere.
 33. The refractive projection objective of claim 30, wherein said refractive projection objective defines a maximum lens diameter and said refractive projection objective further comprises: a plurality of lenses defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; said double asphere being mounted at a distance from said image plane corresponding at least to said maximum lens diameter; the lenses of said double asphere defining a mean lens diameter; and, said mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of said mean lens diameter.
 34. The projection objective of claim 33, wherein said plurality of lenses defines at least two constrictions.
 35. The projection objective of claim 33, comprising at least two of said double aspheres and said spacings thereof being equidistant.
 36. The projection objective of claim 33, wherein the radii of the best-fitting spherical lens surfaces of one of said double aspheres differ from one another by less than 30%.
 37. The projection objective of claim 33, wherein the apex radii of the best-fitting spherical lens surfaces of a double asphere, which are assigned to the respective aspheric lens surfaces, differ from one another by less than 30%.
 38. The projection objective of claim 33, wherein the diameters of the first thirteen lens surfaces hardly differ from each other, preferably by less than 10%.
 39. The projection objective of claim 33, wherein a numerical aperture of at least 0.8 is made available by the double asphere.
 40. The projection objective of claim 33, wherein a numerical aperture of at least 0.9 is made available by the double asphere.
 41. The projection objective of claim 33, wherein two mutually adjacent lens surfaces define an intermediate space chargeable with a fluid.
 42. The projection objective of claim 33, wherein at least 40% of the lenses are spherical.
 43. The projection objective of claim 33, wherein at least 60% of the lenses are spherical.
 44. A projection objective defining a maximum lens diameter and including: a plurality of lenses defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; said double asphere being mounted at a distance from said image plane corresponding at least to said maximum lens diameter; the lenses of said double asphere defining a mean lens diameter; said mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of said mean lens diameter; and, said projection objective being a refractive projection objective defining a maximum lens diameter and including: at least five lens groups having lenses defining lens surfaces and defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; and, said double asphere being mounted from said image plane at a distance of at least said maximum lens diameter.
 45. The refractive projection objective of claim 44, wherein said plurality of lenses defines at least two constrictions.
 46. The refractive projection objective of claim 44, wherein the aspheric surfaces are arranged on different lenses.
 47. The refractive projection objective of claim 45, wherein all aspheric are mounted ahead of the first constriction.
 48. The refractive projection objective of claim 44, comprising two of said double aspheres and the mutually adjacent lens surfaces of each double asphere are mounted at a spacing from each other of at most their mean half lens 5 diameter measured from the optical axis.
 49. The refractive projection objective of claim 48, wherein the mutually adjacent aspheric lens surfaces of each of said aspheres defines an air gap measured on the optical axis of a maximum of 20% of the mean radius of the corresponding asphere.
 50. The refractive projection objective of claim 44, wherein a numerical aperture of at least 0.8 is made available by the double asphere.
 51. The refractive projection objective of claim 44, wherein a numerical aperture of at least 0.9 is made available by the double asphere.
 52. The refractive projection objective of claim 44, wherein two mutually adjacent lens surfaces define an intermediate space chargeable with a fluid.
 53. The refractive projection objective of claim 44, wherein at least 40% of the lenses are spherical.
 54. The refractive projection objective of claim 44, wherein at least 60% of the lenses are spherical.
 55. A projection objective defining a maximum lens diameter and including: a plurality of lenses defining an object plane and an image plane; at least two of said lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere; said double asphere being mounted at a distance from said image plane corresponding at least to said maximum lens diameter; the lenses of said double asphere defining a mean lens diameter; said mutually adjacent lens surfaces being mounted at a spacing from each other which is less than half of said mean lens diameter; and, said projection objective being a refractive projection objective including: two lens groups of negative refractive power; and, at least one of said lens groups of negative refractive power including only two lenses of negative refractive power.
 56. The refractive projection objective of claim 55, wherein the other one of said lens groups of negative refractive power has maximally two lenses of negative refractive power.
 57. The refractive projection objective of claim 56, wherein said lens groups define at least two constrictions and an aspheric lens surface is arranged in the second constriction.
 58. The refractive projection objective of claim 56, further comprising a lens group of positive refractive power including at least one lens having an aspheric surface; and, a diaphragm mounted in said lens group of positive refractive power.
 59. The refractive projection objective of claim 55, further comprising at least two lenses having respective mutually adjacent lens surfaces which are aspheric to define a double asphere. 